妯℃嫙鐢佃矾閮ㄥ垎涔犻绛旀
绗簩绔?/p>
鏅朵綋浜屾瀬绠″強搴旂敤鐢佃矾
2-1
锛庡～绌?/p>
锛?/p>
1
锛?/p>
N
鍨嬪崐瀵间綋鏄湪鏈緛鍗婂浣撲腑鎺哄叆浜斾环鍏冪礌锛?/p>
P
鍨嬪崐瀵间綋鏄湪鏈緛鍗婂浣撲腑鎺哄叆
涓変环鍏冪礌
銆?/p>
锛?/p>
2
锛夊綋娓╁害鍗囬珮鏃讹紝浜屾瀬绠＄殑鍙嶅悜楗卞拰鐢垫祦浼?/p>
澧炲ぇ
銆?/p>
锛?/p>
3
锛?/p>
PN
缁撶殑缁撶數瀹瑰寘鎷娍鍨掔數瀹瑰拰鎵╂暎鐢靛銆?/p>
锛?/p>
4
锛夋櫠浣撶鐨勪笁涓伐浣滃尯鍒嗗埆鏄?/p>
鏀惧ぇ鍖恒�佹埅姝㈠尯鍜岄ケ鍜屽尯銆傚湪鏀惧ぇ鐢佃矾涓紝鏅朵綋
绠￠�氬父宸ヤ綔鍦?/p>
鏀惧ぇ鍖?/p>
鍖恒�?/p>
锛?/p>
5
锛?/p>
缁撳瀷鍦烘晥搴旂宸ヤ綔鍦ㄦ亽娴佸尯鏃讹紝
鍏舵爡
-
婧愰棿鎵�鍔犵數鍘嬪簲璇?/p>
鍙嶅亸
銆?/p>
锛堟鍋忋�?/p>
鍙嶅亸锛?/p>
2-2
锛庡垽鏂笅鍒楄娉曟纭笌鍚︺�?/p>
锛?/p>
1
锛夋湰寰佸崐瀵间綋娓╁害鍗囬珮鍚庯紝涓ょ杞芥祦瀛愭祿搴︿粛鐒剁浉绛夈�?/p>
锛?/p>
锛?/p>
锛?/p>
2
锛?/p>
P
鍨嬪崐瀵间綋甯︽鐢碉紝
N
鍨嬪崐瀵间綋甯﹁礋鐢点�?/p>
锛?/p>
锛?/p>
锛?/p>
3
锛夌粨鍨嬪満鏁堝簲绠″鍔犵殑鏍?/p>
-
婧愮數鍘嬪簲浣挎爡
-
婧愰棿鐨勮�楀敖灞傛壙鍙楀弽鍚戠數鍘嬶紝鎵嶈兘淇濊瘉
R
GS
澶х殑鐗圭偣銆?/p>
锛?/p>
锛?/p>
锛?/p>
4
锛夊彧瑕佸湪绋冲帇绠′袱绔姞鍙嶅悜鐢靛帇灏辫兘璧风ǔ鍘嬩綔鐢ㄣ�?/p>
锛?/p>
锛?/p>
锛?/p>
5
锛夋櫠浣撶宸ヤ綔鍦ㄩケ鍜岀姸鎬佹椂鍙戝皠鏋佹病鏈夌數娴佹祦杩囥�?/p>
锛?/p>
锛?/p>
锛?/p>
6
锛夊湪
N
鍨嬪崐瀵间綋涓鏋滄幒鍏ヨ冻澶熼噺鐨勪笁浠峰厓绱狅紝鍙皢鍏舵敼鍨嬩负
P
鍨嬪崐瀵间綋銆?/p>
锛?/p>
锛?/p>
锛?/p>
7
锛?/p>
PN
缁撳湪鏃犲厜鐓с�佹棤澶栧姞鐢靛帇鏃讹紝缁撶數娴佷负闆躲�?/p>
锛?/p>
锛?/p>
锛?/p>
8
锛夎嫢鑰楀敖鍨?/p>
N
娌熼亾
MOS
鍦烘晥搴旂鐨?/p>
U
GS
澶т簬闆讹紝鍒欏叾杈撳叆鐢甸樆浼氭槑鏄惧噺灏忋�?/p>
锛堬級
绛旀锛?/p>
锛?/p>
1
锛夊锛涙俯搴﹀崌楂樺悗锛岃浇娴佸瓙娴撳害浼氬鍔狅紝浣嗘槸瀵逛簬鏈緛鍗婂浣撴潵璁诧紝鐢靛瓙鍜?/p>
绌虹┐鐨勬暟閲忓缁堟槸鐩哥瓑鐨勩�?/p>
锛?/p>
2
锛夐敊锛涘浜?/p>
P
鍨嬪崐瀵间綋鎴?/p>
N
鍨嬪崐瀵间綋鍦ㄦ病鏈夊舰鎴?/p>
PN
缁撴椂锛屽浜庣數涓�х殑鐘?/p>
鎬併�?/p>
锛?/p>
3
锛夊锛涚粨鍨嬪満鏁堝簲绠″湪鏍呮簮涔嬮棿娌℃湁缁濈紭灞傦紝鎵�浠ュ鍔犵殑鏍?/p>
-
婧愮數鍘嬪簲浣挎爡
-
婧愰棿鐨勮�楀敖灞傛壙鍙楀弽鍚戠數鍘嬶紝鎵嶈兘淇濊瘉
R
GS
澶х殑鐗圭偣銆?/p>
锛?/p>
4
锛夐敊锛涚ǔ鍘嬬瑕佽繘鍏ョǔ鍘嬪伐浣滅姸鎬佷袱绔姞鍙嶅悜鐢靛帇蹇呴』杈惧埌绋冲帇鍊笺�?/p>
锛?/p>
5
锛夐敊锛涙櫠浣撶宸ヤ綔鍦ㄩケ鍜岀姸鎬佸拰鏀惧ぇ鐘舵�佹椂鍙戝皠鏋佹湁鐢垫祦娴佽繃锛屽彧鏈夊湪鎴?/p>
姝㈢姸鎬佹椂娌℃湁鐢垫祦娴佽繃銆?/p>
锛?/p>
6
锛夊锛?/p>
N
鍨嬪崐瀵间綋涓幒鍏ヨ冻澶熼噺鐨勪笁浠峰厓绱狅紝涓嶄絾鍙鍚堝師鍏堟幒鍏ョ殑浜斾环
鍏冪礌锛岃�屼笖鍙娇绌虹┐鎴愪负澶氭暟杞芥祦瀛愶紝浠庤�屽舰鎴?/p>
P
鍨嬪崐瀵间綋銆?/p>
锛?/p>
7
锛夊锛?/p>
PN
缁撳湪鏃犲厜鐓с�佹棤澶栧姞鐢靛帇鏃讹紝澶勪簬鍔ㄦ�佸钩琛＄姸鎬侊紝鎵╂暎鐢垫祦鍜屾紓
绉荤數娴佺浉绛夈�?/p>
锛?/p>
8
锛夐敊銆傜粷缂樻爡鍦烘晥搴旂鍥犱负鏍呮簮闂村拰鏍呮紡涔嬮棿鏈?/p>
SiO2
缁濈紭灞傝�屼娇鏍呮簮闂寸數闃婚潪甯?/p>
澶с�傚洜姝よ�楀敖鍨?/p>
N
娌熼亾
MOS
鍦烘晥搴旂鐨?/p>
U
GS
澶т簬闆讹紝鏈夌粷缂樺眰鏁呰�屼笉褰卞搷杈撳叆鐢甸樆銆?/p>
2-3
锛庢�庢牱鐢ㄤ竾鐢ㄨ〃鍒ゆ柇浜屾瀬绠＄殑姝ｃ�佽礋鏋佹�у強濂藉潖锛?/p>
绛旓細鍙互鍒╃敤涓囩敤琛ㄧ殑鐢甸樆鎸℃祴閲忎簩鏋佺涓ょ鐢甸樆锛屾鍚戞椂鐢甸樆寰堝皬锛屽弽鍚戞椂鐢甸樆寰?/p>
澶с�?/p>
2-4
锛?/p>
浜屾瀬绠＄數璺棰?/p>
2-4
鍥炬墍绀猴紝
璇曞垽鏂浘涓殑浜屾瀬绠℃槸瀵奸�氳繕鏄埅姝紵杈撳嚭鐢靛帇涓?/p>
澶氬皯锛?/p>