鍖栧姘旂浉娌夌Н
姒傝堪
鍖栧姘旂浉娌夌Н
(Chemical vapor deposition
锛?/p>
绠�绉?/p>
CVD)
鏄弽搴旂墿璐ㄥ湪姘旀�佹潯浠朵笅鍙戠敓鍖栧
鍙嶅簲锛岀敓鎴愬浐鎬佺墿璐ㄦ矇绉湪鍔犵儹鐨勫浐鎬佸熀浣撹〃闈紝杩涜�屽埗寰楀浐浣撴潗鏂欑殑宸ヨ壓鎶�鏈�?/p>
CVD
鎶�
鏈彲浠ョ敓闀块珮璐ㄩ噺鐨勫崟鏅惰杽鑶滐紝
鑳藉鑾峰緱鎵�闇�鐨勬幒鏉傜被鍨嬪拰鍘氬害锛?/p>
鏄撲簬瀹炵幇澶ф壒閲忕敓浜э紝
鍥?/p>
鑰屽湪宸ヤ笟涓婂緱鍒板箍娉涚殑搴旂敤銆傚伐涓氫笂鍒╃敤
CVD
鍒跺鐨勫寤剁墖甯告湁涓�涓垨澶氫釜鍩嬪眰鍙敤鎵╂暎
鎴栫瀛愭敞鍏ョ殑鏂瑰紡鎺у埗鍣ㄤ欢缁撴瀯鍜屾幒鏉傚垎甯冿紱澶栧欢灞傜殑姘у拰纰冲惈閲忎竴鑸緢浣庛�備絾鏄?/p>
CVD
澶?/p>
寤跺眰瀹规槗褰㈡垚鑷幒鏉傦紝瑕佺敤涓�瀹氭帾鏂芥潵闄嶄綆鑷幒鏉傘�?/p>
CVD
鐢熼暱鏈虹悊寰堝鏉傦紝鍙嶅簲涓敓鎴愬绉嶆垚鍒嗭紝涔熶細浜х敓涓�浜涗腑闂存垚鍒嗭紝褰卞搷鍥犵礌鏈夊緢
澶氾紝濡傦細鍏堣函浣撶绫伙紱宸ヨ壓鏂规硶锛?/p>
tcvi
锛?/p>
icvi
锛?/p>
pcvd
锛?/p>
锛涘弽搴旀潯浠讹紙娓╁害锛屽帇鍔涳紝娴侀噺锛?/p>
锛涜Е濯?/p>
绉嶇被锛涙皵浣撴祿搴︼紱琛熀缁撴瀯锛涙俯搴︽搴︼紱鐐夊唴鐪熺┖搴︾瓑澶栧欢宸ヨ壓鏈夊緢澶氬墠鍚庣浉缁э紝褰兼杩炶疮
鐨勬楠ゃ�?/p>
鍘熺悊
灏嗕袱绉嶆垨涓ょ浠ヤ笂鐨勬皵鎬佸師鏉愭枡瀵煎叆鍒颁竴涓弽搴斿鍐咃紝
鐒跺悗浠栦滑鐩镐簰涔嬮棿鍙戠敓鍖栧
鍙嶅簲锛屽舰鎴愪竴绉嶆柊鐨勬潗鏂欙紝娌夌Н鍒板熀浣撹〃闈笂銆傚弽搴旂墿澶氫负閲戝睘姘寲鐗╋紝鍏堣鍔犵儹鍒颁竴
瀹氭俯搴︼紝杈惧埌瓒冲楂樼殑钂告苯鍘嬶紝鐢ㄨ浇姘旓紙涓�鑸负
Ar
鎴?/p>
H2
锛夐�佸叆鍙嶅簲鍣ㄣ�傚鏋滄煇绉嶉噾灞?/p>
涓嶈兘褰㈡垚楂樺帇姘寲鐗╄捀姹斤紝灏变唬涔嬩互鏈夋満閲戝睘鍖栧悎鐗┿�傚湪鍙嶅簲鍣ㄥ唴锛岃娑傛潗鏂欐垨鐢ㄩ噾灞?/p>
涓濇偓鎸傦紝鎴栨斁鍦ㄥ钩闈笂锛屾垨娌夋病鍦ㄧ矇鏈殑娴佸寲搴婁腑锛屾垨鏈韩灏辨槸娴佸寲搴婁腑鐨勯绮掋�傚寲瀛?/p>
鍙嶅簲鍣ㄤ腑鍙戠敓锛?/p>
浜х墿灏变細娌夌Н鍒拌娑傜墿琛ㄩ潰锛?/p>
搴熸皵
锛堝涓?/p>
HCl
鎴?/p>
HF
锛?/p>
琚鍚戠⒈鎬у惛鏀舵垨
鍐烽槺銆傞櫎浜嗛渶瑕佸緱鍒扮殑鍥烘�佹矇绉墿澶栵紝鍖栧鍙嶅簲鐨勭敓鎴愮墿閮藉繀椤绘槸姘旀�?/p>
娌夌Н鐗╂湰韬殑
楗卞拰钂告皵鍘嬪簲瓒冲浣庯紝浠ヤ繚璇佸畠鍦ㄦ暣涓弽搴斻�佹矇绉繃绋嬩腑閮戒竴鐩翠繚鎸佸湪鍔犵儹鐨勮‖搴曚笂銆?/p>
鍙嶅簲杩囩▼锛?/p>
锛?/p>
1
锛夊弽搴旀皵浣撳悜琛簳琛ㄩ潰鎵╂暎锛?/p>
2
锛夊弽搴旀皵浣撹鍚搁檮浜庤‖搴曡〃闈紙
3
锛夊湪琛ㄩ潰
杩涜鍖栧鍙嶅簲銆佽〃闈㈢Щ鍔ㄣ�佹垚鏍稿強鑶滅敓闀匡紙
4
锛夌敓鎴愮墿浠庤〃闈㈣В鍚革紙
5
锛夌敓鎴愮墿鍦ㄨ〃闈㈡墿
鏁ｃ�?/p>
鎵�閫夋嫨鐨勫寲瀛﹀弽搴旈�氬父搴旇婊¤冻锛?/p>
鈶犲弽搴旂墿璐ㄥ湪瀹ゆ俯鎴栦笉澶珮鐨勬俯搴︿笅鏈�濂芥槸姘旀�侊紝
鎴栨湁寰堥珮鐨勮捀姘斿帇锛屼笖鏈夊緢楂樼殑绾害锛氣憽閫氳繃娌夌Н鍙嶅簲鑳藉褰㈡垚鎵�闇�瑕佺殑鏉愭枡娌夌Н灞傦細
鈶㈠弽搴旀槗浜庢帶鍒跺湪娌夌Н娓╁害涓嬶紝鍙嶅簲鐗╁繀椤绘湁瓒冲楂樼殑钂告皵鍘?/p>
涓昏璁惧
鐢熼暱璁惧鍒嗕负寮�绠″拰闂涓ょ銆傞棴绠″寤舵槸灏嗘簮鏉愭枡锛岃‖搴曪紝杈撹繍鍓備竴璧锋斁鍦ㄤ竴瀵嗛棴瀹?/p>
鍣ㄤ腑锛?/p>
瀹瑰櫒鎶界┖鎴栧厖姘斻�?/p>
寮�绠＄郴缁熸槸鐢ㄨ浇姘斿皢鍙嶅簲鐗╄捀姹界敱婧愬尯杈撹繍鍒拌‖搴曞尯杩涜鍖栧
鍙嶅簲鍜屽寤剁敓闀匡紝鍓骇鐗╄杞芥皵鎼哄甫鎺掑嚭绯荤粺銆?/p>
甯稿帇
CVD
鍙嶅簲涓湁绔嬪紡鍙嶅簲鍣紝姘村钩
寮忓弽搴斿櫒锛屽渾鐩樺紡鍙嶅簲鍣紝鍜屽渾妗跺紡鍙嶅簲鍣ㄧ瓑銆?/p>
瓒呴珮鐪熺┖璁惧鏈?/p>
UHV/CVD
鍙嶅簲绯荤粺銆?/p>
杩樻湁绛夌瀛愬寮?/p>
CVD
澶栧欢鐢熼暱瑁呯疆锛屽厜澧炲己澶栧欢鐢熼暱瑁呯疆锛屾隘鍖栫墿
VPE
绯荤粺鍜?/p>
MOCVD
鐢?/p>
闀跨郴缁熴�?/p>
鎶�鏈壒鐐?/p>
姣忎竴涓?/p>
CVD
绯荤粺閮藉繀椤诲叿澶囧涓嬪姛鑳斤細
鈶犲皢鍙嶅簲姘斾綋鍙婂叾绋�閲婂墏閫氬叆鍙嶅簲鍣紝
骞惰兘杩?/p>
琛屾祴閲忓拰璋冭妭锛?/p>
鈶¤兘涓哄弽搴旈儴浣嶆彁渚涚儹閲忥紝骞堕�氳繃鑷姩绯荤粺灏嗙儹閲忓弽棣堣嚦鍔犵儹婧愶紝浠ユ帶鍒舵秱瑕嗘俯搴︺�?/p>
鈶㈠皢娌夌Н鍖哄煙鍐呯殑鍓骇鍝佹皵浣撴娊璧帮紝骞惰兘瀹夊叏澶勭悊銆?/p>